Benchmarking: Cleanrooms

Cleanrooms are highly energy intensive to operate. Cleanroom systems include process equipment, HVAC systems, lighting, etc. HVAC systems in cleanrooms are dramatically different from their counterparts in commercial buildings in terms of reliability, safety requirements, and scale. Benchmarking energy use in cleanrooms is particularly important in that there is little industry data available to compare energy use. The lack of energy data and standard metrics makes comparison difficult or impossible. It is also difficult to set appropriate design goals, compare performance over time, and compare performance against other similar cleanrooms. Cleanroom energy benchmarking can provide baseline information to better understand cleanroom energy performance, and can provide information to identify energy saving opportunities.

Graphic Results - Charts showing comparative benchmarked metrics for individual cleanrooms

Site Reports - Summary and detailed information on each cleanroom

• Other Case Studies

Publications

1. Tschudi,W.F. and P. Rumsey. 2004. "Using Benchmarking to Identify Energy Efficiency Opportunities in Cleanrooms: The Labs21 Approach" ASHRAE Symposium.
2. Xu, T. and W. Tschudi. 2002. "Energy Performance of Cleanroom Environmental Systems." Proceedings of the 48th Annual Technical Meeting and Exposition of the Institute of Environmental Science and Technology (ESTECH), April 28-May 1, 2002, Anaheim, CA. Lawrence Berkeley National Laboratory Report No. LBNL-49106.
   
3. Xu, Tenfang, W. Tschudi, G. Bell, and D. Sartor. 2001. "High-Tech Buildings Market Transformation Project: Cleanroom Energy Benchmarking, High-Performance Fume Hood Demonstration/Test, Market Transformation Activities: Final Report to CIEE and PG&E." Lawrence Berkeley National Laboratory Report No. 49112.
   
4. Tschudi, W., K. Benschine, S. Fok, and P. Rumsey. 2001. "Cleanroom Energy Benchmarking in High-Tech and Biotech Industries." Proceedings of the 2001 ACEEE Industrial Conference (July 21).
5. Sartor, D., M.A. Piette, and W. Tschudi. 2000. "Strategies for Energy Benchmarking in Cleanrooms and Laboratory-Type Facilities." Proceedings of the 2000 ACEEE Summer Study on Energy Efficiency in Buildings. American Council for an Energy Efficient Economy, Washington, D.C.
   

Presentations

• Using Benchmarking to Identify Energy Efficiency Opportunities in Cleanrooms: The Labs21 Approach [2004]
• Cleanroom Energy Benchmarking [2004]
• Energy Benchmarking: What's Your Building's Energy IQ? [2004]
• Cleanroom Energy Benchmarking [2001]
• Cleanroom Energy Benchmarking for HighTech and BioTech Industries [2001]
• Strategies for Energy Benchmarking in Cleanrooms and Laboratory-Type Facilities [2000]