Cleanroom energy benchmarking can provide baseline information to better understand cleanroom energy performance, and can provide information to identify energy saving opportunities.
Best Practices for HVAC air and water systems, power systems, process systems, and other cross-cutting areas have emerged.
Case studies by LBNL researchers illustrate the implementation of a wide range of best practices for cleanrooms in the U.S. and abroad.
One of the major energy uses in cleanrooms is in the management of particles in the space. The acceptable level of particles depends on the use of the space, as indicated by the cleanroom specification.
Increasingly popular in cleanrooms, fan filters have significant energy use. LBNL developed a standard method of evaluating fan-filter-unit (FFU) performance, providing a set of useful metrics.
Cleanrooms are increasingly making use of minienvironments to isolate sensitive manufacturing processes. Industry does not always take advantage of the fact that air- cleanliness standards in the surrounding cleanroom spaces can be relaxed.