Resources

Recirculation air handler fan energy can account for 10 to 30% of total cleanroom energy use. There are three fundamental recirculation system configurations: fan filter unit (FFU), ducted HEPA, and pressurized plenum.

Chiller efficiency is a function of the chilled water supply temperature. All other things equal, higher chilled water temperatures result in improved chiller efficiency.

The use of rotary vane vacuum pumps to support a number of different types of process equipment is widespread in industry. Semiconductor cleanroom facilities, laboratories, pharmaceutical, and biotech facilities rely heavily on the use of vacuum pumps.

Exhaust airflow rates are typically dictated by process equipment exhaust specifications. Equipment manufacturers’ suggested exhaust quantities have been found to be overstated and not science based.

Hine Design, a subsidiary of Asyst Technologies, operates a robotics manufacturing facility in Sunnyvale, California.

The high-tech factory is located outside Kuala Lumpur, the capital of Malaysia, and is owned and operated by Western Digital, Inc., a US based computer hard disk drive manufacturer.

Applied Materials (Applied) occupies their corporate headquarters, including more than 30 buildings, in Santa Clara, California.

Charts showing comparative benchmarked metrics for individual cleanrooms

Lawrence Berkeley National Laboratory Applications's Team web page for energy efficient cleanrooms: benchmarking, cleanroom energy programming guide, case studies, link, and fact sheet. This site is not maintained. 

This paper presents findings from an in-situ study on a group of minienvironments, with the focus on characterizing and evaluating environmental performance of the minienvironments as part of a large-scale of in-situ investigation into the total perform

A minienvironment is normally used to maintain a level of stringent cleanliness through controlling particle concentrations within a tightened volume of clean spaces.