Resources

Free cooling utilizes the evaporative cooling capacity of a cooling tower to indirectly produce chilled water for use in medium temperature loops, such as process cooling loops and sensible cooling loops.

Fan energy can account for 20 to 40% of total cleanroom energy use. Fan energy use is directly proportional to the pressure drop that the fan is pushing air through.

Recirculation air flow in cleanrooms has traditionally been determined through various methods.

The need to provide 100% uptime with a near equivalent reliability in critical facilities does not preclude the opportunity to reduce first cost and improve efficiency by avoiding inefficient oversizing of mechanical equipment.

Process exhaust often operates 8,760 hours a year and is a significant consumer of energy in a cleanroom.

Hine Design, a subsidiary of Asyst Technologies, operates a robotics manufacturing facility in Sunnyvale, California.

The high-tech factory is located outside Kuala Lumpur, the capital of Malaysia, and is owned and operated by Western Digital, Inc., a US based computer hard disk drive manufacturer.

This guide describes energy efficiency metrics and benchmarks that can be used to track the performance of and identify potential opportunities to reduce energy use in cleanrooms. This guide is primarily intended for personnel who have responsibility fo

This project developed a benchmarking strategy for use in cleanrooms to obtain energy end use breakdown and to allow energy use comparison of key systems and components.

Lawrence Berkeley National Laboratory Applications's Team web page for energy efficient cleanrooms: benchmarking, cleanroom energy programming guide, case studies, link, and fact sheet. This site is not maintained. 

This paper presents findings from an in-situ study on a group of minienvironments, with the focus on characterizing and evaluating environmental performance of the minienvironments as part of a large-scale of in-situ investigation into the total perform

A minienvironment is normally used to maintain a level of stringent cleanliness through controlling particle concentrations within a tightened volume of clean spaces.