Resources
| Date | Title | Files and Links | |
|---|---|---|---|
| 03/27/2015 |
HVAC Air Systems: Air Change Rates Featured Recirculation air change rates (ACRs) are an important factor in contamination control in a cleanroom and are the single largest factor in determining fan and motor sizing for a recirculation air handling system. |
 HVAC Air Systems_Air Change Rates .pdf |
|
| 03/27/2015 |
HVAC Water Systems: Waterside Free Cooling Free cooling utilizes the evaporative cooling capacity of a cooling tower to indirectly produce chilled water for use in medium temperature loops, such as process cooling loops and sensible cooling loops. |
HVACWaterSystems_Waterside Free Cooling.pdf |
|
| 03/27/2015 |
HVAC Air Systems: Recirculation Air System types Recirculation air handler fan energy can account for 10 to 30% of total cleanroom energy use. There are three fundamental recirculation system configurations: fan filter unit (FFU), ducted HEPA, and pressurized plenum. |
HVAC Air Systems_CR.pdf |
|
| 03/27/2015 |
HVAC Air Systems: Low Pressure Drop Air Systems Fan energy can account for 20 to 40% of total cleanroom energy use. Fan energy use is directly proportional to the pressure drop that the fan is pushing air through. |
HVAC Air Systems_Low Pressure Drop .pdf |
|
| 03/27/2015 |
HVAC Water Systems: Dual Temperature Chilled Water Loops Chiller efficiency is a function of the chilled water supply temperature. All other things equal, higher chilled water temperatures result in improved chiller efficiency. |
HVACWaterSystems_DualTemp.pdf |
|
| 03/27/2015 |
HVAC Air Systems: Demand-controlled Filtration Recirculation air flow in cleanrooms has traditionally been determined through various methods. |
HVACAirSystems_Demand Controlled Filtration.pdf |
|
| 03/27/2015 |
Process Systems: Vacuum Pump Optimization The use of rotary vane vacuum pumps to support a number of different types of process equipment is widespread in industry. Semiconductor cleanroom facilities, laboratories, pharmaceutical, and biotech facilities rely heavily on the use of vacuum pumps. |
ProcessSystems_Vacuum Pump Optimization.pdf |
|
| 03/27/2015 |
HVAC Systems: Rightsizing The need to provide 100% uptime with a near equivalent reliability in critical facilities does not preclude the opportunity to reduce first cost and improve efficiency by avoiding inefficient oversizing of mechanical equipment. |
CrossCutting_Rightsizing.pdf |
|
| 03/27/2015 |
HVAC Air Systems: Exhaust Optimization Exhaust airflow rates are typically dictated by process equipment exhaust specifications. Equipment manufacturers’ suggested exhaust quantities have been found to be overstated and not science based. |
HVAC Air Systems_Exhaust Opt.pdf |
|
| 03/27/2015 |
HVAC Air Systems: Exhaust Systems Process exhaust often operates 8,760 hours a year and is a significant consumer of energy in a cleanroom. |
HVAC_Air Systems_ExhaustSystems.pdf |
|
| 03/26/2015 |
Hine Design: Variable Speed Drive Control of Recirculation Fans for Class 100 Cleanroom Hine Design, a subsidiary of Asyst Technologies, operates a robotics manufacturing facility in Sunnyvale, California. |
Hine Design_CR_Fans.pdf |
|
| 03/26/2015 |
Motorola: Cleanroom Declassification from Class 10,000 to Class 100,000 The purpose of this project was to reduce operational costs and energy use by reducing the cleanroom classification from class 10,000 to class 100,000. |
Motorola CR Declassification.pdf |
|
| 03/26/2015 |
Western Digital: Comprehensive Cleanroom Facility Renovation and Cleanliness Upgrade The high-tech factory is located outside Kuala Lumpur, the capital of Malaysia, and is owned and operated by Western Digital, Inc., a US based computer hard disk drive manufacturer. |
WD_CR Upgrade.pdf |
|
| 03/26/2015 |
Measuring and Managing Cleanroom Energy Use This article will discuss findings from an extensive study of energy use in 28 cleanrooms. |
CR Measure and Manage.pdf |
|
| 03/25/2015 |
Self-benchmarking Guide (Cleanrooms) This guide describes energy efficiency metrics and benchmarks that can be used to track the performance of and identify potential opportunities to reduce energy use in cleanrooms. This guide is primarily intended for personnel who have responsibility fo |
Self-benchmarking Guide for Cleanrooms |
|
| 03/25/2015 |
Applied Materials: Chilled Water Plant Efficiency Upgrade Applied Materials (Applied) occupies their corporate headquarters, including more than 30 buildings, in Santa Clara, California. |
Chilled Water Plant Efficiency Upgrade.pdf |
|
| 03/25/2015 |
Cleanroom Energy Benchmarking In High-Tech and Biotech Industries This project developed a benchmarking strategy for use in cleanrooms to obtain energy end use breakdown and to allow energy use comparison of key systems and components. |
ACEEE_Benchmarking_2001.pdf |
|
| 03/25/2015 |
Charts Benchmarking Cleanrooms Charts showing comparative benchmarked metrics for individual cleanrooms |
Charts Benchmarking Cleanrooms.pdf |
|
| 09/01/2007 |
Demand Controlled Filtration in an Industrial Cleanroom In an industrial cleanroom, significant energy savings were realized by implementing two types of demand controlled filtration (DCF) strategies, one based on particle counts and one on occupancy. |
Demand_Filtration CR_2007.pdf |
|
| 11/06/2006 |
Applications Team: Energy Efficient Cleanroom Lawrence Berkeley National Laboratory Applications's Team web page for energy efficient cleanrooms: benchmarking, cleanroom energy programming guide, case studies, link, and fact sheet. This site is not maintained. |
Link to site | |
| 11/01/2006 |
Development of a fan filter unit test standard, lab validations, & applications across industries After numerous peer reviews across industries, this standard energy and airflow test method for FFUs is used to quantify total pressure efficiency and power consumption of FFUs across a range of operating conditions—defined in terms of actual airflow ra |
FFU Test Procedures Article.pdf |
|
| 10/19/2006 |
Characterization of mini environments in a clean room This paper presents findings from an in-situ study on a group of minienvironments, with the focus on characterizing and evaluating environmental performance of the minienvironments as part of a large-scale of in-situ investigation into the total perform |
Minienvironments_CR_2006.pdf |
|
| 07/01/2006 |
The development of fan filter unit with flow rate feedback control in a cleanroom A new type of fan filter unit (FFU) systems was developed and evaluated in this study. |
Development of fan filter unit_Xu_2006.pdf |
|
| 06/01/2006 |
Characterization of mini environments in a cleanroom: Design characteristics and environmental performance A minienvironment is normally used to maintain a level of stringent cleanliness through controlling particle concentrations within a tightened volume of clean spaces. |
Characterization of minienvironments_Xu_2006.pdf |
|
| 01/01/2006 |
Cleanroom Energy Benchmarking (Legacy site) The Applications Team site dedicated to benchmarking cleanrooms. This web page is not maintained. |
Cleanroom Energy Benchmarking |