Resources

The need to provide 100% uptime with a near equivalent reliability in critical facilities does not preclude the opportunity to reduce first cost and improve efficiency by avoiding inefficient oversizing of mechanical equipment.

Process exhaust often operates 8,760 hours a year and is a significant consumer of energy in a cleanroom.

Recirculation air handler fan energy can account for 10 to 30% of total cleanroom energy use. There are three fundamental recirculation system configurations: fan filter unit (FFU), ducted HEPA, and pressurized plenum.

Chiller efficiency is a function of the chilled water supply temperature. All other things equal, higher chilled water temperatures result in improved chiller efficiency.

The use of rotary vane vacuum pumps to support a number of different types of process equipment is widespread in industry. Semiconductor cleanroom facilities, laboratories, pharmaceutical, and biotech facilities rely heavily on the use of vacuum pumps.

The purpose of this project was to reduce operational costs and energy use by reducing the cleanroom classification from class 10,000 to class 100,000.

This article will discuss findings from an extensive study of energy use in 28 cleanrooms. 

This guide describes energy efficiency metrics and benchmarks that can be used to track the performance of and identify potential opportunities to reduce energy use in cleanrooms. This guide is primarily intended for personnel who have responsibility fo

This project developed a benchmarking strategy for use in cleanrooms to obtain energy end use breakdown and to allow energy use comparison of key systems and components.

Lawrence Berkeley National Laboratory Applications's Team web page for energy efficient cleanrooms: benchmarking, cleanroom energy programming guide, case studies, link, and fact sheet. This site is not maintained. 

This paper presents findings from an in-situ study on a group of minienvironments, with the focus on characterizing and evaluating environmental performance of the minienvironments as part of a large-scale of in-situ investigation into the total perform

A minienvironment is normally used to maintain a level of stringent cleanliness through controlling particle concentrations within a tightened volume of clean spaces.