Cleanroom Energy Benchmarking In High-Tech and Biotech Industries


This project developed a benchmarking strategy for use in cleanrooms to obtain energy end use breakdown and to allow energy use comparison of key systems and components. This paper describes the metrics used in this study and some of the observations and conclusions that the project team has identified to date. ACEEE 2001 Paper #66. Author(s): Tschudi, B., K. Benschine, S. Fok, and P. Rumsey