Process Systems: Vacuum Pump Optimization


The use of rotary vane vacuum pumps to support a number of different types of process equipment is widespread in industry. Semiconductor cleanroom facilities, laboratories, pharmaceutical, and biotech facilities rely heavily on the use of vacuum pumps. Vacuum pumps typically account for 5-10% of a semiconductor cleanroom facility’s total electricity consumption. Recent advances in vacuum pump technology have improved the efficiency of vacuum pumps by 50 to 60%. Through integration with process controls, further savings are possible through implementation of an idle mode when vacuum is not needed by the process. Combining best practice technology and design, such as placing vacuum pumps close to the supported equipment, makes it possible to reduce vacuum pump energy use by 50 to 90%. Further benefits include less noise, smaller electrical infrastructure, and smaller central cooling equipment.