Strategies for Energy Benchmarking in Cleanrooms and Labs

06/01/2000

This paper identifies the unique issues associated with benchmarking energy use in high-tech facilities. Specific options discussed include statistical comparisons, point-based rating systems, model-based techniques, and hierarchical end-use and performance-metrics evaluations.

Author(s): Sartor, D., M. Piette, W. Tschudi, and S. Folk

Technologies: